SMC has designed a variety of products to be used in a clean room environment.  Actuators, valves, airline equipment and speed controls have all the features needed to be a perfect fit in a clean room.

In response to the latest demands in process control, SMC has incorporated leading edge product innovations and engineering excellence to develop a high purity product suite.  These high purity solutions strive to continually advance the technology of minimizing contaminates. Achieving success as a quality leader by minimizing both particulate and chemical contamination to levels compatible with the most demanding requirements.

Vacuum chambers are generally used in the semiconductor manufacturing process.  The peripheral equipment used to exhaust air from the supply atmospheric pressure to the vacuum chamber such as valves, pressure switches, cylinders and gate valves should meet conditions such as non-leakage, clean specifications and corrosion resistance.  SMC's high vacuum products meet those demands.

Designed specifically to meet industry demands, SMC's series diaphragm pumps are constructed to be used with using high purity chemicals.  Our pumps are lightweight, compact, high flow rate solution to meet the most demanding needs.

Suitable for high flow rate filtration, industrial filters series offers a variety of elements that can be selected according to the filtration conditions.

Pneumatic positioners are compact with visibility of the pressure indicator.  Other features include an improved enclosure protection IP65, interchangeable mounting, excellent shock and vibration performance, and a 1/2 split range available by simple span adjustment. Cylinder positioner provides accurate and stable positioning of air cylinders.  The compact design allows easy installation and maintenance.  A span adjuster and zero adjuster are provided for the adjustment of the feed back spring.

SMC offers a variety of hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.

The air-hydro unit consists of a converter and a valve unit that are compactly integrated. It converts air pressure to an equivalent hydraulic pressure, and this hydraulic pressure is used for operating an actuator, thus solving the problem that is associated with the compression characteristics of air.

Hydraulic filters are designed for installation between the pump and reservoir tank.  Their main function is to protect the pump from contaminants.

AP Tech, also known as Advanced Pressure Technology, manufactures a wide assortment of gas delivery components. Founded in 1987, AP Tech has grown to be a global leader in pressure regulators and valves used for semiconductor wafer fabrication and other clean industries such as solar and flat panel displays. AP Tech also services many other industries delivering specialty and bulk gases for a wide variety of applications.